Zoran Lj. Petrovic's Books

Plasma Electronics, Second Edition

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

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Plasma Electronics, Second Edition

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory. Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.

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414

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CRC Press

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ISBN 10

1482222051

ISBN 13

9781482222050

Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

Write a review Read reviews Take a Quiz Solve Book Puzzle

Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,

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Page Count

355

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CRC Press

Published Date

ISBN 10

1420012274

ISBN 13

9781420012279

Plasma Electronics, Second Edition

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

Write a review Read reviews Take a Quiz Solve Book Puzzle

Plasma Electronics, Second Edition

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

Average ratings

N/A

Write a review

Solve jigsaw puzzle

Age

Page Count

414

Publisher

CRC Press

Published Date

ISBN 10

1482222051

ISBN 13

9781482222050

Book's by Zoran Lj. Petrovic

Plasma Electronics, Second Edition

Plasma Electronics, Second Edition

Plasma Electronics

Plasma Electronics

Plasma Electronics, Second Edition

Plasma Electronics, Second Edition

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