As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such materials during the chemical-mechanical planarization (CMP) process used in Damascene patterning. Low-kappa dielectrics tend to be softer and less chemically reactive than silicon dioxide, providing significant challenges to successful removal and planarization of such materials. The focus of this book is to merge the complex CMP models and mechanisms that have evolved in the past decade with recent experimental results with copper and low-kappa CMP to develop a comprehensive mechanism for low- and high-removal-rate processes. The result is a more in-depth look into the fundamental reaction kinetics that alter, selectively consume, and ultimately planarize a multi-material structure during Damascene patterning.
Covering both the theoretical and practical aspects of critical care,Irwin & Rippe’s Intensive Care Medicine, Ninth Edition, provides state-of-the-art, evidence-based knowledge for specialty physicians and non-physicians practicing in the adult intensive care environment. Drs. Craig M. Lilly, Walter A. Boyle, and Richard S. Irwin, along with a team of expert contributing authors and education expert, William F. Kelly, offer authoritative, comprehensive guidance from an interprofessional, collaborative, educational, and scholarly perspective, encompassing all adult critical care specialties.
Part Five in the Fishes of the Western North Atlantic series describes the lizardfishes, other iniomi, and deepsea gulpers.Specialist authorships of its sections include detailed species descriptions with keys, life history and general habits, abundance, range, and relation to human activity, such as economic and sporting importance. The text is written for an audience of amateur and professional ichthyologists, sportsmen, and fishermen, based on new revisions, original research, and critical reviews of existing information. Species are illustrated by exceptional black and white line drawings, accompanied by distribution maps and tables of meristic data.
Originally published in 1978, this book develops a conceptual synthesis of the field of physiological psychology, the science specifically concerned with the relationship between the brain and the mind. It was designed to elucidate the important questions under investigation, the basic intellectual and technical problems that were encountered, and the significance of the major empirical results of the time. Of equal or even greater importance is the author’s derivation of the general principles relating brain and mind that had emerged after decades of modern research into this important question. Included in the volume are historical and philosophical perspectives on the mind-brain problem as well as extensive discussions of instruments, methodology, empirical findings and theory. Here is a powerful heuristic tool that informs the reader about the concepts and ideas implicit in this science rather than simply exhaustively listing experimental results. The author does not ignore findings; he organizes them into three broad categories – localization; representation, and learning – then emphasizes the relationships among experiments. This is a book that synthesizes, integrates, and stresses concepts, principles and problems. The careful organization of the book makes it especially useful for students of brain and mind at all levels.
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