Toshiaki Makabe's Books

Plasma Electronics, Second Edition

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

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Plasma Electronics, Second Edition

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory. Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.

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Page Count

414

Publisher

CRC Press

Published Date

ISBN 10

1482222051

ISBN 13

9781482222050

Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

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Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,

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Page Count

355

Publisher

CRC Press

Published Date

ISBN 10

1420012274

ISBN 13

9781420012279

Coal and Coal-Related Compounds

Structures, Reactivity and Catalytic Reactions

By: Toshiaki Kabe,Atsushi Ishihara,Eika Weihua Qian,I. Putu Sutrisna,Yaeko Kabe

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Coal and Coal-Related Compounds

Structures, Reactivity and Catalytic Reactions

By: Toshiaki Kabe,Atsushi Ishihara,Eika Weihua Qian,I. Putu Sutrisna,Yaeko Kabe

Coal is more abundant than petroleum and natural gas. Further, coal is not localized but can be used by many more countries than petroleum. Therefore, if we can establish coal utilization technology, coal will bring about a great contribution to human life and society. On the other hand, shortage of petroleum and natural gas are anticipated in the second half of the 21st century. To compensate, the use of coal is expected to gradually increase during the 21st century. In the future, the development of the coal utilization technology will become more and more important to insure the supply of liquid fuels for transportation and carbon sources for the manufacture of chemicals and plastic materials.In order to develop such technologies, the elucidation of the structure of coal is a fundamental area of study. Further, more efficient coal utilization technology must be established to meet environmental legislation. One of the key technologies for this purpose is catalysis. This volume provides detail of the basic and practical aspects of the science and technology of coal utilization with and without catalysts. The actual structure of coal, the chemistry included in the reactivity of coal, the methods to elucidate the structure of coal and re-action mechanisms of coal conversion, the most important catalyst for converting coal to liquid and gas, the role of the catalysts in coal conversion, the problems in the process engineering, and how to meet environmental regulations are discussed in detail. The recent progress in studies on the structure and reactivity of coal made over the last century is summarized and reviewed with emphasis on both fundamental and applied aspects of the science and technology for coal processing in the presence and absence of catalysts. * This book highlights the issues faced in trying to discover more efficient coal utilization technology.* Provides detailed discussion on how to meet environmental regulations and legislation. * Fills the gap between both the scientific and practical sides of coal utilization with and without catalysts.

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Page Count

361

Publisher

Elsevier

Published Date

ISBN 10

0080529232

ISBN 13

9780080529233

Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

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Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

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Page Count

406

Publisher

CRC Press

Published Date

ISBN 10

1482222108

ISBN 13

9781482222104

Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

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Plasma Electronics

Applications in Microelectronic Device Fabrication

By: Toshiaki Makabe,Zoran Lj. Petrovic

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Solve jigsaw puzzle

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Page Count

355

Publisher

CRC Press

Published Date

ISBN 10

1420012274

ISBN 13

9781420012279

Book's by Toshiaki Makabe

Plasma Electronics, Second Edition

Plasma Electronics, Second Edition

Plasma Electronics

Plasma Electronics

Coal and Coal-Related Compounds

Coal and Coal-Related Compounds

Plasma Electronics

Plasma Electronics

Plasma Electronics

Plasma Electronics

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