The aim of this monograph is to outline the physics of image formation, electron–specimen interactions, and image interpretation in transmission el- tron microscopy. Since the last edition, transmission electron microscopy has undergone a rapid evolution. The introduction of monochromators and - proved energy ?lters has allowed electron energy-loss spectra with an energy resolution down to about 0.1 eV to be obtained, and aberration correctors are now available that push the point-to-point resolution limit down below 0.1 nm. After the untimely death of Ludwig Reimer, Dr. Koelsch from Springer- Verlag asked me if I would be willing to prepare a new edition of the book. As it had served me as a reference for more than 20 years, I agreed without hesitation. Distinct from more specialized books on speci?c topics and from books intended for classroom teaching, the Reimer book starts with the basic principles and gives a broad survey of the state-of-the-art methods, comp- mented by a list of references to allow the reader to ?nd further details in the literature. The main objective of this revised edition was therefore to include the new developments but leave the character of the book intact. The presentation of the material follows the format of the previous e- tion as outlined in the preface to that volume, which immediately follows. A few derivations have been modi?ed to correspond more closely to modern textbooks on quantum mechanics, scattering theory, or solid state physics.
Transmission Electron Microscopy presents the theory of image and contrast formation, and the analytical modes in transmission electron microscopy. The principles of particle and wave optics of electrons are described. Electron-specimen interactions are discussed for evaluating the theory of scattering and phase contrast. Also discussed are the kinematic and dynamical theories of electron diffraction and their applications for crystal-structure analysis and imaging of lattices and their defects. X-ray micronanalysis and electron energy-loss spectroscopy are treated as analytical methods. This fourth edition includes discussions of recent progress, especially in the area of Schottky emission guns, convergent-beam electron diffraction, electron tomography, holography and the high resolution of crystal lattices.
The aim of this book is to outline the physics of image formation, electron specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of MĂĽnster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec tron beam can be blanked at high frequencies for time-resolving exper iments and what problems have tobe taken into account when focusing.
While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions.
The aim of this book is to outline the physics of image formation, electron specimen interactions and image interpretation in transmission electron mic roscopy. The book evolved from lectures delivered at the University of Munster and is a revised version of the first part of my earlier book Elek tronenmikroskopische Untersuchungs- und Priiparationsmethoden, omitting the part which describes specimen-preparation methods. In the introductory chapter, the different types of electron microscope are compared, the various electron-specimen interactions and their applications are summarized and the most important aspects of high-resolution, analytical and high-voltage electron microscopy are discussed. The optics of electron lenses is discussed in Chapter 2 in order to bring out electron-lens properties that are important for an understanding of the function of an electron microscope. In Chapter 3, the wave optics of elec trons and the phase shifts by electrostatic and magnetic fields are introduced; Fresnel electron diffraction is treated using Huygens' principle. The recogni tion that the Fraunhofer-diffraction pattern is the Fourier transform of the wave amplitude behind a specimen is important because the influence of the imaging process on the contrast transfer of spatial frequencies can be described by introducing phase shifts and envelopes in the Fourier plane. In Chapter 4, the elements of an electron-optical column are described: the electron gun, the condenser and the imaging system. A thorough understanding of electron-specimen interactions is essential to explain image contrast.
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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