Jingsong Wei's Books

Laser Heat-Mode Lithography

Principle and Methods

By: Jingsong Wei

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This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.

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Page Count

215

Publisher

Springer Nature

Published Date

ISBN 10

9811509433

ISBN 13

9789811509438

Nonlinear Super-Resolution Nano-Optics and Applications

By: Jingsong Wei

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Nonlinear Super-Resolution Nano-Optics and Applications

By: Jingsong Wei

This book covers many advances in the subjects of nano-optics and nano photonics. The author describes the principle and technical schematics of common methods for breaking through the optical diffraction limit and focuses on realizing optical super-resolution with nonlinear effects of thin film materials. The applications of nonlinear optical super-resolution effects in nano-data storage, nanolithography, and nano-imaging are also presented. This book is useful to graduate students majoring in optics and nano science and also serves as a reference book for academic researchers, engineers, technical professionals in the fields of super-resolution optics and laser techniques, nano-optics and nano photonics, nano-data storage, nano imaging, micro/nanofabrication and nanolithography and nonlinear optics.

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Page Count

262

Publisher

Springer

Published Date

ISBN 10

3662444887

ISBN 13

9783662444887

Nonlinear Super-Resolution Nano-Optics and Applications

By: Jingsong Wei

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Nonlinear Super-Resolution Nano-Optics and Applications

By: Jingsong Wei

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Solve jigsaw puzzle

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Page Count

262

Publisher

Springer

Published Date

ISBN 10

3662444887

ISBN 13

9783662444887

Laser Heat-Mode Lithography

Principle and Methods

By: Jingsong Wei

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Laser Heat-Mode Lithography

Principle and Methods

By: Jingsong Wei

Average ratings

N/A

Write a review

Solve jigsaw puzzle

Age

Page Count

215

Publisher

Springer Nature

Published Date

ISBN 10

9811509433

ISBN 13

9789811509438

Book's by Jingsong Wei

Laser Heat-Mode Lithography

Laser Heat-Mode Lithography

Nonlinear Super-Resolution Nano-Optics and Applications

Nonlinear Super-Resolution Nano-Optics and Applications

Nonlinear Super-Resolution Nano-Optics and Applications

Nonlinear Super-Resolution Nano-Optics and Applications

Laser Heat-Mode Lithography

Laser Heat-Mode Lithography

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