Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.
An advanced level textbook covering geometric, chemical, and electronic structure of electronic materials, and their applications to devices based on semiconductor surfaces, metal-semiconductor interfaces, and semiconductor heterojunctions. Starting with the fundamentals of electrical measurements on semiconductor interfaces, it then describes the importance of controlling macroscopic electrical properties by atomic-scale techniques. Subsequent chapters present the wide range of surface and interface techniques available to characterize electronic, optical, chemical, and structural properties of electronic materials, including semiconductors, insulators, nanostructures, and organics. The essential physics and chemistry underlying each technique is described in sufficient depth with references to the most authoritative sources for more exhaustive discussions, while numerous examples are provided throughout to illustrate the applications of each technique. With its general reading lists, extensive citations to the text, and problem sets appended to all chapters, this is ideal for students of electrical engineering, physics and materials science. It equally serves as a reference for physicists, material science and electrical and electronic engineers involved in surface and interface science, semiconductor processing, and device modeling and design. This is a coproduction of Wiley and IEEE * Free solutions manual available for lecturers at www.wiley-vch.de/supplements/
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Nuclear Energy ebook Collection contains 6 of our best-selling titles, providing the ultimate reference for every nuclear energy engineer's library. Get access to over 3500 pages of reference material, at a fraction of the price of the hard-copy books. This CD contains the complete ebooks of the following 6 titles:Petrangeli, Nuclear Safety, 9780750667234 Murray, Nuclear Energy, 9780750671361 Bayliss, Nuclear Decommissioning, 9780750677448 Suppes, Sustainable Nuclear Power, 9780123706027 Lewis, Fundamentals of Nuclear Reactor Physics, 9780123706317 Kozima, The Science of the Cold Fusion Phenomenon, 9780080451107*Six fully searchable titles on one CD providing instant access to the ULTIMATE library of engineering materials for nuclear energy professionals *3500 pages of practical and theoretical nuclear energy information in one portable package. *Incredible value at a fraction of the cost of the print books
This book provides a review of the state-of-the-advancing-art in growth, processing and devices from compound semiconductors. Consisting of the proceedings of an important topical conference held at the University of Florida, speakers from both the U.S. and Japan were present. This fascinating work discusses critical issues in growth and characterization by semi-insulating bulk crystals, with particular emphasis placed on the latest modification of gas sources. It includes the advantages, limitations, and techniques pertaining to chemical vapor deposition. This compilation presents the most recent advances in the new technologies involving compound semiconductors, thus it fills an important need in the fast-moving field of microelectronics. This one-of-a-kind resource provides contrasts and insight into U.S. and Japanese technologies and devices as well as indications of future directions. It provides a very up-to-date and comprehensive treatment of world-class scientific and technological developments in this astounding area of major commercial importance. These proceedings will be a useful, indispensable resource for scientific researchers, process engineers, and technology strategists.
A group of science educators with experience of being involoved in curriculum development, and in conducting extensive research on many aspects of teaching and learning science, have combined their findings in this volume.; Each author has conducted research into his or her own area of science education and presents the implications of this research for a specific area of science teaching. The experiences of members of the Monash Children's Science Group; specifically three primary teachers and one biology teacher, have also been included so as to present the voices of teachers for whom writing a personal account of their teaching is often an unappealing task.
An Essential Guide to Electronic Material Surfaces and Interfaces is a streamlined yet comprehensive introduction that covers the basic physical properties of electronic materials, the experimental techniques used to measure them, and the theoretical methods used to understand, predict, and design them. Starting with the fundamental electronic properties of semiconductors and electrical measurements of semiconductor interfaces, this text introduces students to the importance of characterizing and controlling macroscopic electrical properties by atomic-scale techniques. The chapters that follow present the full range of surface and interface techniques now being used to characterize electronic, optical, chemical, and structural properties of electronic materials, including semiconductors, insulators, nanostructures, and organics. The essential physics and chemistry underlying each technique is described in sufficient depth for students to master the fundamental principles, with numerous examples to illustrate the strengths and limitations for specific applications. As well as references to the most authoritative sources for broader discussions, the text includes internet links to additional examples, mathematical derivations, tables, and literature references for the advanced student, as well as professionals in these fields. This textbook fills a gap in the existing literature for an entry-level course that provides the physical properties, experimental techniques, and theoretical methods essential for students and professionals to understand and participate in solid-state electronics, physics, and materials science research. An Essential Guide to Electronic Material Surfaces and Interfaces is an introductory-to-intermediate level textbook suitable for students of physics, electrical engineering, materials science, and other disciplines. It is essential reading for any student or professional engaged in surface and interface research, semiconductor processing, or electronic device design.
This book presents coherent and systematic coverage of the broad and dynamic field of free atom and cluster atom chemistry. The text provides a comprehensive overview of the current literature and describes the mostimportant experimental techniques developed since 1980 including bimetallic clusters/catalysts, carbon clusters (fullerenes) and trapped single atoms. Metal atoms, clusters, and particles are covered in sequence with the Periodic Table.
The second edition of Nanochemistry covers the main studies of nanoparticle production, reactions, and compounds, and reviews the work of leading scientists from around the world. This book is the first monograph on nanochemistry, giving perspectives on the present status and future possibilities in this rapidly advancing discipline. It provides the solid fundamentals and theory of nanoscience, and progress through topics including synthesis and stabilization of nanoparticles, cryochemistry of metal atoms and nanoparticles, chemical nanoreactors, and more. Nanoparticles are capable of transformations that have already led to revolutionary applications, including reagents for self-cleaning glass surfaces and fabrics, different antiseptic coverings, sensors for monitoring the environment and catalysts mitigating pollution. Leads the reader through the theory, research and key applications of nanochemistry, providing a thorough reference for researchers 40% more content than the first edition and an expanded author team Reviews new advances in the field, including organic nanoparticles and key methods for making nanoparticles (e.g. solvated metal atom dispersion and self-assembly techniques)
This new volume substantially updates the original pyridazines volume which was published in 1973. Announcing the latest volume in the successful and prominent Chemistry of Heterocyclic Compounds Series.
While books on the medical applications of x-ray imaging exist, there is not one currently available that focuses on industrial applications. Full of color images that show clear spectrometry and rich with applications, X-Ray Imaging fills the need for a comprehensive work on modern industrial x-ray imaging. It reviews the fundamental science of x-ray imaging and addresses equipment and system configuration. Useful to a broad range of radiation imaging practitioners, the book looks at the rapid development and deployment of digital x-ray imaging system.
High Resolution Nuclear Magnetic Resonance Spectroscopy, Volume 2 provides a comprehensive coverage of the theories and methods for analysis of high resolution spectra. The title also presents a discourse on other variables that affect the spectra. The text first details the correlations of 1H resonance spectral parameters with molecular structure, and then proceeds to tackling the 19F nuclear magnetic resonance studies. Next, the selection deals with the NMR spectra of nuclei other than hydrogen fluoride. The text also provides data sets, such as nuclear properties, T-values, and chemical shifts. The book will be of great use to scientists who utilize nuclear magnetic resonance in their work.
Here in one source is a wide variety of practical, everydayinformation often required by chemists but seldom found together,if at all, in the standard handbooks, data collections, manuals,and other usual sources. Discussing physical, chemical, andmechanical properties of substances and systems, the authors answersuch questions as: * How do I test for and destroy peroxides in different solventsand what is the best way to purify such solvents? * What are the structure, physical properties, and recentreferences to the use of common-name solvents and solvent aids suchas the "Skellysolves," "Cellosolves," "Crownanes," and"Glymes"? * What is the utility of a particular molecular sieve, orpermeation gel, or epoxy cement, or liquid crystal, and where do Ibuy them and find references to their application? The book is divided into nine chapters and covers properties ofatoms and molecules, spectroscopy, photochemistry, chromatography,kinetics and thermodynamics, various experimental techniques, andmathematical and numerical information, including the definitions,values, and usage rules of the newly adopted International Systemof Units (SI Units). A section on statistical treatment of datawhich provides an actual least-squares computer program is alsoincluded. In the spectroscopy chapter, very extensive andup-to-date collections of spectral correlation data are presentedfor ir, uv-vis, optical rotation, nmr, and mass spectra, along withdata on esr and nqr spectroscopy. Also included is a variety ofhard-to-classify but frequently sought information, such as namesand addresses of microanalysis companies and chemistry publishers,descriptions and commercial sources of atomic and molecular models,and safety data for hazardous chemicals. More than 500 keyreferences are also included, most of which are recent. There areimportant hints and definitions associated with the art as well asthe state of the art for the appropriate subjects. Also foundthroughout the book are about 250 suppliers and directions forobtaining special booklets or other material. Containing a wealth of useful information, The Chemist'sCompanion will be an indispensable guide for students andprofessional chemists in nearly all the chemical disciplines. Inaddition, it will provide for the teacher and student an unusualadjunct for use in a broad cross-section of chemistry courses.
The present volume describes the general properties of the thorium atom and ions, the thermodynamics of its compounds and solutions, the behavior of solutions and solid com pounds under the influence of its own radiation as well as an external radiation field, and spectroscopic data in great detail. The different chapters are of special interest to scientists who work in these fields, and also in the corresponding fields of other elements. In some special fields there exists a detailed knowledge of this radioelement whereas in other fields, such as M6Bbauer spectra, lower oxidation states, or radiation stability, there are large gaps. Due to the fact that the significance 23 of thorium as a breeder fuel ( 2"fh to be converted to fissile 233U after thermal neutron capture) has decreased within the last decade, the behavior of thorium is not as yet so thoroughly investigated as the heavier radioactive element uranium. Many of these data, however, are not only of academic interest, e.g., the knowledge of atomic spectra is needed for some analytical methods, especially in the trace concentration region. Due to the noble gaS-like electronic configuration of the tetravalent ion, there are no absorption bands in the visible region so that in general spectra and data are very scarce. This volume is a very detailed and critically reviewed compilation, written by experts from the Federal Republic of Germany, Belgium, and the United States.
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Despite reductions in the level of research activity in most fields which, for reasons of economic decline, have taken place in the U.S. during the last year or two, world progress in the fundamental aspects has continued actively. An important aspect of such recent work has been the use of nonaqueous solvents in studies on the constitution of the double-layer and electrochemical reactions. Interpretation of the behavior of electrode interfaces in such solvents demands more knowledge of the solvation properties of ions in nonaqueous media. Chapter 1 by Pad ova on "Ionic Solvation in Nonaqueous and Mixed Solvents" gives an up to date review of the present state of knowledge in this field, together with tabulations of data that are likely to be of quantitative value in further investigations of both homogeneous and heterogeneous electrochemistry in such media. Electrochemical studies of cathodic processes in nonaqueous solvents have, in recent years, revealed the role of solvated electrons. These are of interest in new approaches to reductive electro-organic synthesis. Similarly, the generation of hydrated electrons in photo cathodic processes is of great interest. In Chapter 2, by Conway, the conditions under which solvated electrons can arise in electrode processes are critically examined and the electro-organic reactions that hwe been investigated are reviewed. The supposed electro generation of hydrated electrons in the water solvent and as inter mediates in cathodic hydrogen evolution is shown to be unlikely.
Anodic Oxidation covers the application of the concept, principles, and methods of electrochemistry to organic reactions. This book is composed of two parts encompassing 12 chapters that consider the mechanism of anodic oxidation. Part I surveys the theory and methods of electrochemistry as applied to organic reactions. These parts also present the mathematical equations to describe the kinetics of electrode reactions using both polarographic and steady-state conditions. Part II examines the anodic oxidation of organic substrates by the functional group initially attacked. This part particularly emphasizes the kinds of intermediates generated and the mechanisms leading to final products. This book is intended primarily to organic chemists and physical electrochemists.
Carbon-13 NMR Spectroscopy focuses on the potential of 13C techniques and the practical difficulties associated with the detection of 13C NMR absorption. This monograph includes a descriptive presentation of 13C shielding results that has been adopted with emphasis on the structural and stereochemical aspects. Organized into four parts encompassing 11 chapters, this book starts with an overview of the characteristics of the NMR signals derived from compounds containing 13C nuclei in natural abundance that are inherently much weaker than those exhibited by protons. This monograph then compares the primary characteristics of 13C NMR with the more familiar proton methods. Other chapters consider the 13C spectra of pyridine, pyridazine, pyrimidine, pyrazine, s-triazine, and s-tetrazine. The final chapter deals with the effects of solute–solvent interactions on the shieldings of other nuclei. This monograph is intended for organic chemists, graduate students, and researchers in various branches of chemistry with an interest in 13C NMR methods as another approach to chemical problems.
Proven processes for ensuring semiconductor device reliability Co-written by experts in the field, Semiconductor Process Reliability in Practice contains detailed descriptions and analyses of reliability and qualification for semiconductor device manufacturing and discusses the underlying physics and theory. The book covers initial specification definition, test structure design, analysis of test structure data, and final qualification of the process. Real-world examples of test structure designs to qualify front-end-of-line devices and back-end-of-line interconnects are provided in this practical, comprehensive guide. Coverage includes: Basic device physics Process flow for MOS manufacturing Measurements useful for device reliability characterization Hot carrier injection Gate-oxide integrity (GOI) and time-dependent dielectric breakdown (TDDB) Negative bias temperature instability Plasma-induced damage Electrostatic discharge protection of integrated circuits Electromigration Stress migration Intermetal dielectric breakdown
Molten Salts Handbook focuses on the features, properties, and structure of molten salts. This book presents several topics in annotated bibliographic table form, including phase equilibria, chemical syntheses, and molten salt electrolytes. Organized into six chapters, this book starts with a tabular presentation of data of the physical properties, thermodynamic properties, electrochemical properties, practical features, as well as spectroscopy and structure of molten salts. This text then illustrates the design features of different experimental assemblies and provides information on the technique through a liberally annotated bibliography. Other chapters provide a chemical index, which offers a ready guide to the status of data over the entire range of interests. This book presents as well the properties of viscosity, density, surface tension, refractive index, and electrical conductance for different compounds as single salt melts. This book is a valuable resource for scientists and researchers from diverse fields, including theoretical and applied electrochemistry, inorganic coordination chemistry, and transition metal chemistry.
The first edition of this work appeared almost thirty years ago, when, as we can see in retrospect, the study of the actinide elements was in its first bloom. Although the broad features of the chemistry of the actinide elements were by then quite well delineated, the treatment of the subject in the first edition was of necessity largely descriptive in nature. A detailed understanding of the chemical consequences of the characteristic presence of Sf electrons in most of the members of the actinide series was still for the future, and many of the systematic features of the actinide elements were only dimly apprehended. In the past thirty years all this has changed. The application of new spectroscopic techniques, which came into general use during this period, and new theoretical insights, which came from a better understanding of chemical bonding, inorganic chemistry, and solid state phenomena, were among the important factors that led to a great expansion and maturation in actinide element research and a large number of new and important findings. The first edition consisted of a serial description of the individual actinide elements, with a single chapter devoted to the six heaviest elements (lawrencium, the heaviest actinide, was yet to be discovered). Less than 15 % of the text was devoted to a consideration of the systematics of the actinide elements.
Comprehensive and up-to-date, this unique four-volume set offers readers a complete overview of the broad spectrum of general chemistry. It enables them to obtain a basic, yet thorough understanding of matter, the processes it undergoes, the principles that govern it, and the international cast of men and women who have been critical in the development of the science of chemistry. From elements, atoms, and molecules to terochemistry, spectroscopy, and chemical bonding, its clear and concise explanations provide an illuminating and readily comprehensible introduction. Key presentations include forty element definition articles, each providing basic periodic table information and general information on the element in question. Ninety-five biographical articles deal with prominent chemists, while other articles provide additional historical context, particularly with respect to eighteenth-, nineteenth-, and twentieth-century developments.
Technology is taking over all aspects of life. Yet studies have shown that up to one half the population is 'technophobic'. This means having negative opinions or being anxious about information technology like personal computers. This book examines the origins of technophobia - what it is, who has it and what causes it. The impact of gender is examined and the social and cognitive psychological factors underlying technophobia are reviewed and combined into an overall psychological model. Techniques for reducing technophobia are discussed, and the effect of technophobia on everyone from school children to teenagers is analysed. Technophobia will be useful both for academic study of the area, and for those devising IT policy in schools, business and government.
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